"Correlation of errors in optical coating production with broad band monitoring"
Tikhonravov A.V., Kochikov I.V., Matvienko I.A., Isaev T.F., Lukyanenko D.V., Sharapova S.A., and Yagola A.G.

We propose a robust estimate that can be used for the prediction of the expected strength of thickness errors correlation in the case of optical coating production with the direct broad band monitoring of a deposition process. A practical application of this estimate requires statistical analysis. We introduce a computationally efficient simulator of thickness errors that have a random character and are able to adequately represent the correlation of thickness errors by a monitoring procedure. It is shown that the expected strength of thickness errors correlation is estimated by the random value whose distribution is close to the log-normal distribution and that the two main parameters of the log-normal probability density function can be used as the parameters characterizing the investigated effect.

Keywords: inverse problems, optical coating technology, optical monitoring, computer simulation.

  • Tikhonravov A.V. – Lomonosov Moscow State University, Research Computing Center; Leninskie Gory, Moscow, 119992, Russia; Dr. Sci., Professor, Director, e-mail: tikh@srcc.msu.ru
  • Kochikov I.V. – Lomonosov Moscow State University, Research Computing Center; Leninskie Gory, Moscow, 119992, Russia; Dr. Sci., Leading Scientist, e-mail: igor@kochikov.ru
  • Matvienko I.A. – Lomonosov Moscow State University, Faculty of Physics; Leninskie Gory, Moscow, 119991, Russia; Student, e-mail: matvienko.ivan.a@gmail.com
  • Isaev T.F. – Lomonosov Moscow State University, Faculty of Physics; Leninskie Gory, Moscow, 119991, Russia; Graduate Student, e-mail: temurisaev@gmail.com
  • Lukyanenko D.V. – Lomonosov Moscow State University, Faculty of Physics; Leninskie Gory, Moscow, 119991, Russia; Ph.D., Associate Professor, e-mail: lukyanenko@physics.msu.ru
  • Sharapova S.A. – Lomonosov Moscow State University, Research Computing Center; Leninskie Gory, Moscow, 119992, Russia; Junior Scientist, e-mail: svet.sharapova@gmail.com
  • Yagola A.G. – Lomonosov Moscow State University, Faculty of Physics; Leninskie Gory, Moscow, 119991, Russia; Dr. Sci., Professor, e-mail: yagola@physics.msu.ru